Esi sixhobo samkela i-non-contact, i-optical phase-shifting yokulinganisa i-interferometric, ayilonakalisi umphezulu we-workpiece ngexesha lokulinganisa, inokulinganisa ngokukhawuleza imizobo ye-three-dimensional ye-micro-topography yomphezulu we-workpieces ezahlukeneyo, kwaye uhlalutye kwaye ubale umlinganiselo. iziphumo.
Ingcaciso yeMveliso
Iimpawu: Ilungele ukulinganisa uburhabaxa bomphezulu beebhloko ezahlukeneyo zegeyiji kunye namalungu optical; ubunzulu be-reticle yomlawuli kunye nedayari; ubukhulu bengubo yesakhiwo se-groove kunye ne-morphology yesakhiwo somda wokugubungela; umphezulu wedisk magnetic (optical) kunye nemagnethi yentloko Umlinganiselo wesakhiwo; Uburhabaxa bomphezulu we-silicon kunye nomlinganiselo wesakhiwo sepateni, njl.
Ngenxa yokuchaneka kokulinganisa okuphezulu kwesixhobo, sineempawu zokungadibanisi kunye nokulinganisa okuthathu, kwaye yamkela ulawulo lwekhompyutheni kunye nohlalutyo olukhawulezayo kunye nokubalwa kweziphumo zokulinganisa. Esi sixhobo sifanelekile kuwo onke amanqanaba ovavanyo kunye neeyunithi zophando lokulinganisa, amagumbi okulinganisa amashishini kunye nemigodi, iindibano zocweyo zokulungisa ngokuchanekileyo, kwaye zifanelekile kumaZiko emfundo ephakamileyo kunye namaziko ophando lwesayensi, njl.
Iiparamitha eziphambili zobugcisa
Uluhlu lokumeta ubunzulu bokungalingani komphezulu wemicroscopic
Kumphezulu oqhubekayo, xa kungekho tshintsho lobude ngequbuliso olukhulu kuno-1/4 wamaza phakathi kweepixels ezimbini ezimeleneyo: 1000-1nm
Xa kukho ukuphakama kwenguquko enkulu kune-1/4 yobude bobude phakathi kweepixels ezimbini ezimeleneyo: 130-1nm
Ukuphindwa komlinganiselo: δRa ≤0.5nm
Ukwandiswa kwelensi yenjongo: 40X
Umngxuma wamanani: Φ 65
Umgama wokusebenza: 0.5mm
Indawo yesixhobo yokujonga Okubonakalayo: Φ0.25mm
Ifoto: 0.13 × 0.13mm
Ukwandiswa kwesixhobo esibonakalayo: 500×
Ifoto (ebonwa ngesikrini sekhompyuter) -2500×
Uluhlu lomlinganiselo womamkeli: 1000X1000
Ubungakanani bePixel: 5.2×5.2µm
Ixesha lokulinganisa isampuli (ukuskena) ixesha: 1S
Umgangatho wesixhobo sokubonakalisa isipili (phezulu): ~50%
Ukubonakaliswa (phantsi): ~4%
Umthombo wokukhanyisa: isibane se-incandescent 6V 5W
Ubude bobude besihluzi sophazamiseko oluluhlaza: λ≒530nm
Isiqingatha sobubanzi λ≒10nm
Ukuphakanyiswa kwe-microscope engundoqo: 110 mm
Ukunyuswa kwetafile: 5 mm
Uluhlu lweentshukumo ku-X no-Y kwicala lendlela: ~10 mm
Uluhlu olujikelezayo lwe-worktable: 360 °
Uluhlu lwe-Tilt yetafile yokusebenza: ± 6 °
Inkqubo yekhompyuter: i-P4, i-2.8G okanye ngaphezulu, i-17-intshi yesikrini esisicaba kunye ne-1G okanye imemori engaphezulu